Bendable ZnO thin film surface acoustic wave devices on polyethylene terephthalate substrate

Bendable surface acoustic wave (SAW) devices were fabricated using high quality c-axis orientation ZnO films deposited on flexible polyethylene terephthalate substrates at 120 °C. Dual resonance modes, namely, the zero order pseudo asymmetric (A0) and symmetric (S0) Lamb wave modes, have been obtained from the SAW devices. The SAW devices perform well even after repeated flexion up to 2500 με for 100 times, demonstrating its suitability for flexible electronics application. The SAW devices are also highly sensitive to compressive and tensile strains, exhibiting excellent anti-strain deterioration property, thus, they are particularly suitable for sensing large strains.