Improving SIMS imaging of FIB bevel cuts with an elaborate sample holder

The limited lateral resolution in classical secondary ion mass spectrometry (SIMS) imaging and challenging depth calibration in depth profiling of composite materials restrain the application range for thin film and interface analysis. A motorized sample holder for accurate focused ion beam bevel cuts is designed to artificially increase the interface region. The sample holder is specifically designed for a TOF.SIMS 5 spectrometer by IONTOF, but the basic principle can easily be transferred to other systems. The application of the sample holder is demonstrated with a thin layer model system. A virtual improvement of the lateral resolution by a factor of ten is achieved.