Reflection conoscopy and micro‐ellipsometry of isotropic thin film structures

Summary The conoscopic image of isotropic thin film structures is discussed, and it is shown that, although the specimens may be optically isotropic, the conoscopic images are generally not angularly symmetric. Theoretical expressions for these patterns are derived and from which full ellipsometric data about the specimen are extracted. In addition, a variety of spatial filters which may be inserted into the optical system in order to enhance specific image contrast are recommended.