Introducing 2D-FETs in Device Scaling Roadmap using DTCO

Superior electrostatic control of 2D-FETs enables continued logic power-performance-area (PPA) scaling beyond the 2nm node. Here, we show that WS 2 -based 2D devices give ~40% inverter performance boost against Si at imec 2nm node, using a process-aware DTCO approach. The DTCO is conducted based on an ab-initio calibrated, physical compact model while area scaling is based on contacted gate pitch scaling. Side contacted source/drain, vertically-stacked 2D sheets and fork-sheet architecture are highlighted as key enablers of 2D-FET technology for multiple advanced nodes, using experimentally realistic mobility and Schottky barrier height conditions.