Autonomous sampling and SHAP interpretation of deposition-rates in bipolar HiPIMS

Key Points

• To examine the use of autonomous sampling and SHAP analysis for studying bipolar HiPIMS deposition rates.
• Utilized autonomous loops for collecting data on HiPIMS processes.
• Employed SHAP analysis to interpret the results of the deposition rates.
• Analyzed over 3000 different bipolar HiPIMS processes statistically.
• Facilitated comprehensive understanding of deposition rates in bipolar HiPIMS.
• Provided insights into the variations and statistical significance of the processes.