Criterion for Vacuum Sparking Designed to Include Both rf and dc

An empirical relation is presented that describes a boundary between no vacuum sparking and possible vacuum sparking. Metal electrodes and rf or dc voltages are used. The criterion applies to a range of surface gradient, voltage, gap, and frequency that extends over several orders of magnitude. Current due to field emission is considered necessary for sparking, but—in addition—energetic ions are required to initiate a cascade process that increases the emitted currents to the point of sparking.