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A technique combining metalorganic decomposition and rf sputtering is used to grow lithium niobate (LiNbO3) thin films on diamond/silicon substrates, and surface acoustic wave (SAW) filters are fabricated by depositing interdigital transducers onto the multilayer LiNbO3/diamond/silicon structures. Microwave characterization is achieved by using a network analyzer. Evidence is found for SAW propagation in these structures. These experimental findings agree with theoretical predictions.
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Lee et al. (2003) studied this question.
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