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Deposition of LiNbO3 thin films on R-cut (0112) sapphire by rf magnetron sputtering has been systematically investigated and repeatable epitaxial relationships between LiNbO3 thin film and sapphire substrate were observed. As a result, the effect of sputtering parameters on deposition of LiNbO3 thin films was determined. Optimal conditions for deposition of high quality (1120), (0112) and (1010) LiNbO3 thin films were found. A filter was successfully fabricated by forming interdigital transducers (IDT) on the surface of a (1010) LiNbO3 thin film on (0112) sapphire. The frequency response curve was measured, and the results are compared with a theoretical model.
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Ho et al. (1995) studied this question.
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