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December 22, 2021Journal of the American Society for Mass SpectrometryOpen Access

ToF-SIMS Depth Profiling of Metal, Metal Oxide, and Alloy Multilayers in Atmospheres of H₂, C₂H₂, CO, and O₂

Jernej Ekar P. Panjan Sandra Drev Janez Kovač

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Abstract

is proposed for the depth profiling of metal/metal oxide multilayers and alloys.

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Ekar et al. (2021) studied this question.

synapsesocial.com/papers/6a033e62f1675f581a757081 https://doi.org/10.1021/jasms.1c00218

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