Nanoindentation and mechanical properties of solids in submicrovolumes, thin near-surface layers, and films: A Review

This paper presents a review devoted to the specific mechanical behavior of thin near-surface layers of various solids, materials, films, and multilayer coatings under local loading. Analysis is made of the principles, techniques, and instruments used for testing and determining mechanical properties of materials on a nanoscale, which, in recent years, have found a wide application under the general name "nanoindentation." Information capabilities of this large and multifunctional family of methods employed for mechanical tests are discussed. Different aspects and specific features of the behavior of solids under severely constrained deformation caused by the local application of a microload to the surface of the test object are considered. Special attention is focused on the physical mechanisms of deformation and fracture under these conditions.