Low-power bipolar resistive switching TiN/HfO₂/ITO memory with self-compliance current phenomenon

In this work, a TiN/HfO2/ITO memory device is fabricated, which shows stable bipolar resistive switching behavior, as well as excellent data retention and good endurance. Moreover, a very low SET voltage of 0.2 V is achieved with a self-compliance current effect. The result brings about an obvious reduction in SET power to 160 µW, which is crucial for future high-density resistive switching memories. On the basis of the conducting filament theory, a possible resistive mechanism is discussed to explain the low SET voltage and self-compliance current phenomenon.