A flexible AMOLED display on the PEN substrate driven by oxide thin-film transistors using anodized aluminium oxide as dielectric

We report a flexible AMOLED display driven by oxide thin film transistors (TFTs) with anodic AlOx gate dielectric on a polyethylene naphthalate (PEN) substrate with a process temperature below 150 °C. The TFTs exhibit a field-effect mobility of 12.87 cm2 V−1 s−1, a subthreshold swing of 0.20 V dec−1, and an Ion/Ioff ratio of 109.