Effects of various materials on thermoelastic damping in micromechanical resonators

This study employs Moore–Gibson–Thompson (MGT) thermoelastic heat conduction theory to analyze thermoelastic damping (TED) and investigate its dynamic behavior in microbeam resonators made from various materials. The main objective of the present work is to examine the influence of different parameters on TED in these systems. To achieve this, numerical computations are performed based on the developed analytical results. Key performance indicators such as normalized attenuation, frequency shift, and the phase-lag parameter are evaluated. The results obtained using the MGT theory are compared with those derived from the GN-III theory for materials including silicon (Si), gold (Au), copper (Cu), and lead (Pb). This study systematically analyzes microbeam resonator dynamics, revealing how beam height influences normalized attenuation and frequency shift. Novel thermoelastic damping effects arising from geometry vibration interplay are captured using MGT thermoelasticity, advancing understanding of high frequency nanoresonators. The findings offer valuable insights for nanomechanics, computational physics, materials science, and structural vibration analysis, highlighting the critical role of nanoresonators in modern electromechanical systems.