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November 1, 1977IBM Journal of Research and Development

Origin and Effects of Negative Ions in the Sputtering of Intermetallic Compounds

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Authors

JCJ. J. CuomoNorth Carolina State UniversityRGR. J. GambinoPurchase CollegeJHJ. M. E. HarperWestern University

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Cite This Study

Cuomo et al. (1977) studied this question.

synapsesocial.com/papers/6a09ea1bb0d552aa8b45f4a6https://doi.org/10.1147/rd.216.0580
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Also Consider

Synapse has enriched 4 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Binding energies in atomic negative ions1975 · 1,539 citations
  2. 2Effect of secondary electrons and negative ions on sputtering of films1976 · 54 citations
  3. 3Relation Between an Atomic Electronegativity Scale and the Work Function1978 · 225 citations
  4. 4Influence of sputtering parameters on the composition of multicomponent films1975 · 68 citations