Internal Dielectric Transduction of a 4.5 GHz Silicon Bar Resonator

This paper presents experimental verification of frequency scaling in an internal dielectric transduced resonator. A silicon bar resonator is excited in its 3 rd and 9 th longitudinal harmonic modes at 1.53 and 4.51 GHz, respectively. The resonator demonstrates a 2 dB improvement in transduction efficiency in its 9 th harmonic relative to its 3 rd harmonic, normalized to the quality Q of the resonance. This result is in close agreement with theory, promising low- impedance transduction of silicon bulk acoustic resonators at frequencies exceeding 10 GHz.