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September 16, 2019IEEE Transactions on Semiconductor ManufacturingOpen Access

A CNN-Based Transfer Learning Method for Defect Classification in Semiconductor Manufacturing

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Authors

KIKazunori ImotoToshiba (Japan)TNTomohiro NakaiToshiba (Japan)TITsukasa IkeToshiba (Japan)

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Imoto et al. (2019) studied this question.

synapsesocial.com/papers/6a0ab2d048609dcc0aac97cchttps://doi.org/10.1109/tsm.2019.2941752
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