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Thin-film inductors for 1 GHz-drive mobile communication handset application has been demonstrated. This is the possible practical application of soft magnetic films in 1 GHz range. Fe61Al13O26 with Ms=1.2 T, ρ=500 μΩ cm, fr=2 GHz were used for the inductors. L=7.6 nH, R=6.5 Ω, and Q=7.4 were obtained at 1 GHz in a 370 μm×370 μm square four turn spiral of line/space=11 μm/11 μm covered with 0.1-μm-thick slitted Fe61Al13O26 film with Cr underlayer. The L was increased over the flux saturated inductor by 8.6% without any degrade of quality factor.
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Yamaguchi et al. (1999) studied this question.
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