A low-pressure (1-10 hPa) pulsed microwave discharge (2.45 GHz) in oxygen of power 100-1000 W operated in a cylindrical vessel is investigated by miscellaneous diagnostic techniques to determine space- and time-resolved concentrations of the most important species. The electron density is measured by monitoring the detuning of a Fabry-Perot resonator, which is in resonance at = 337 µm (HCN-laser). The same technique is used to detect those electrons generated when a sufficiently strong laser beam crosses laterally the intracavity HCN laser mode and destroys O-and O2 -ions in the discharge by photodetachment. During the release of photodetached electrons the microwave field in the discharge chamber changes. This field alteration is utilized to determine the nO- /nO2 - ratio, which is about 7 over the entire pulse. The concentration of rovibrational states of O2and vibrational temperatures are measured by coherent anti-Stokes-Raman scattering (CARS) as well as O concentrations by two-photon-allowed laser induced fluorescence (TALIF).
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Baeva et al. (2000) studied this question.
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