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January 1, 1986IEEE Transactions on Plasma Science

Negative Ion Kinetics in RF Glow Discharges

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Authors

RGRichard A. GottschoLam Research (United States)CGCarl E. GaebeAT&T (United States)

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Gottscho et al. (1986) studied this question.

synapsesocial.com/papers/6a70969af44fa9f079de4167https://doi.org/10.1109/tps.1986.4316511
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