Design, fabrication and test of self-assembled optical corner cube reflectors

Active and passive micromachined corner cube reflectors (CCRs) with high surface flatness and precise assembly are demonstrated by out-of-plane rotation of bonded silicon parts powered by the surface tension of thick photoresist pads. A two-mask fabrication process is used, and an angular alignment accuracy of <0.18° is achieved by minimizing the number of movable parts and controlling the assembly with mechanical limiters. Active CCRs based on torsion mirror scanners with a Q-factor of 20 are demonstrated. When used as a retroreflection data transmitter, a data rate of up to 200 bit s−1 and a signal-to-noise ratio of 30 dB are obtained with a drive voltage of 30 V.