The development of a frequency output absolute pressure sensor is described. The sensor element is etched out of single crystal silicon using boron doping to define the shape of the mechanical resonators on one side of a wafer and the diaphragm on the other.
No takes yet. Share an insight, caveat, or question.
J. C. Greenwood (1984) studied this question.
Synapse has enriched 3 closely related papers on similar clinical questions. Consider them for comparative context: