Experimental study demonstrates high frequency tunability and coupling in unreleased aluminum nitride acoustic resonators, suggesting improved wireless filtering.
This manuscript introduces a new class of highly-dispersive Bulk Acoustic Wave (BAW) resonators enabling lithographic frequency reconfiguration <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">(Δ fₛ/fₛ)</tex> and relatively high electromechanical coupling <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">(kₜ²)</tex> in an unreleased Aluminum Nitride (AlN) based platform. Acoustic dispersion analysis helps identifying the correct electrode dimensions to excite the <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">S₀</tex> mode within a region of large group velocity and maximum effective coupling. Experimental results corroborate expectations in terms of low spurious modes, <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Δ fₛ/fₛ>7%</tex> , and <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">kₜ² > 3%</tex> at 2.34GHz, and provide the appropriate design tools to minimize the impact of stepper critical dimension (CD) variations.
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Segovia-Fernandez et al. (2022) studied this question.
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