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A micromachined, fluid-filled condenser hydrophone has been developed for underwater acoustic sensing. This device is under 1 mm in size, yet test results have demonstrated open circuit sensitivity of -206 dB ref. 1V/ mu Pa at 2 kHz, comparable to ferroelectric sensors orders of magnitude larger. The theory, fabrication and performance of the device are discussed. >
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Jonathan Bernstein (2003) studied this question.
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