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December 1, 1976Journal of The Electrochemical Society

Chemical Etching of Silicon: IV . Etching Technology

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BSB. SchwartzCiS Research Institute for Micro Sensors and PhotovoltaicsHRHarry RobbinsHowell Laboratories (United States)

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Schwartz et al. (1976) studied this question.

synapsesocial.com/papers/6a0fd7974fb650da4ffe9091https://doi.org/10.1149/1.2132721
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