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March 1, 1970IBM Journal of Research and Development

Projection Masking, Thin Photoresist Layers and Interference Effects

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SMS. MiddelhoekDelft University of Technology

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S. Middelhoek (1970) studied this question.

synapsesocial.com/papers/6a0fdf7e57bfcc72645fc017https://doi.org/10.1147/rd.142.0117
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