Polymer–Silicon Flexible Structures for Fast Chemical Vapor Detection

Stimuli-responsive microactuators controlled by the interfacial stress across the polymer/silicon interface are introduced as simple, miniature, and flexible sensing platforms for chemical vapor detection. The sensors detect water vapor with sensitivities of ± 10 parts per billion (±0.00005% relative humidity) and faster than previously recorded response times. These characteristics make the bimaterial silicon cantilevers excellent candidates for critical security and defense needs as well as for environmental monitoring. Supporting information for this article is available on the WWW under http://www.wiley-vch.de/contents/jc_2089/2007/c1419_s.pdf or from the author. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.