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January 23, 2009SensorsOpen Access

A Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors

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Authors

CZChi ZhangUniversity of TorontoGZGaofei ZhangTsinghua UniversityZYZheng YouShandong Freshwater Fisheries Research Institute

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Zhang et al. (2009) studied this question.

synapsesocial.com/papers/6a156d4c79ff98d0de4e9ea2https://doi.org/10.3390/s90100631
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