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October 26, 2007Journal of Micromechanics and Microengineering

Design, fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror

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Authors

XXXiaohui XuGansu Agricultural UniversityBLBaoqing LiUniversity of Science and Technology of ChinaFYFeng YanRutgers, The State University of New Jersey

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Xu et al. (2007) studied this question.

synapsesocial.com/papers/6ab2241f0dbea774e0adcdf2https://doi.org/10.1088/0960-1317/17/12/008
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