What question did this study set out to answer?

To synthesize and evaluate the structural and electrical properties of monocrystalline 6H-SiC thin films epitaxially deposited on off-axis 6H-SiC substrates via chemical vapor deposition.

September 1, 1988Journal of Applied Physics

Chemical vapor deposition and characterization of 6H-SiC thin films on off-axis 6H-SiC substrates

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Authors

HKHoyoul KongGyeongsang National University JGJeffrey T. GlassAT&T (United States)RDR. F. DavisCarnegie Mellon University

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Implication

Experimental investigation demonstrates high-quality epitaxial growth of 6H-SiC thin films on off-axis substrates, indicating improved structural and electrical performance for power electronics.

Key Points

To synthesize and evaluate the structural and electrical properties of monocrystalline 6H-SiC thin films epitaxially deposited on off-axis 6H-SiC substrates via chemical vapor deposition.
Deposited 6H-SiC thin films on 6H-SiC {0001} substrates tilted 3° off-axis toward 〈112̄0〉 at 1773 K using chemical vapor deposition (CVD).
Characterized interfacial defects and structural boundaries using cross-sectional and plan-view transmission electron microscopy (TEM).
Fabricated Au-6H-SiC Schottky barrier diodes to evaluate carrier concentration and electrical leakage under reverse bias.
Eliminated interface-generated defects and double positioning boundaries, yielding high-quality monocrystalline films.
Identified unintentional n-type conduction with an electron carrier concentration on the order of 10¹⁶ cm⁻³.
Achieved a low reverse-bias leakage current density of 3.2×10⁻⁵ A/cm² at 55 V in fabricated Schottky diodes.

Cite This Study

Kong et al. (1988) studied this question.

synapsesocial.com/papers/6a198fd4407564563bf641ab https://doi.org/10.1063/1.341608

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Implication

Experimental investigation demonstrates high-quality epitaxial growth of 6H-SiC thin films on off-axis substrates, indicating improved structural and electrical performance for power electronics.

Chemical vapor deposition and characterization of 6H-SiC thin films on off-axis 6H-SiC substrates

Discussion

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Implication

Key Points

Cite This Study

Chemical vapor deposition and characterization of 6H-SiC thin films on off-axis 6H-SiC substrates

Discussion

Member takes

Implication

Key Points

Cite This Study

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