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An 8x4 avalanche diode array in a 0.8/spl mu/m CMOS process uses single photon counting for time-of-flight range finding with 100ps 40mW decollimated laser pulses. An accuracy of 618/spl mu/m is achieved from 15cm to 1 m with 10/sup 4/ pulses.
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Niclass et al. (2004) studied this question.
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