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Endurance ~ 10 12 cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (t <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">p</inf> ). The correlation between switching polarization (△P) and fatigue behavior of high endurance is discussed. For long t <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">p</inf> (= 1 µs), AFE exhibits excellent endurance with > 10 10 cycles as compared with FE ~ 10 9 cycles. With shortening t <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">P</inf> , the endurances of FE and AFE are significantly improved. There is no significant degradation until > 10 11 cycling is observed for FE with t <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">p</inf> =20ns.
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Hsiang et al. (2022) studied this question.