Review of interferogram analysis methods

Various aspects of interferogram analysis are reviewed. Fixed interferogram evaluation, fringe measurements, the global interpolation of interferograms, the application of Zernike polynomials, Fourier analysis of interferograms, and phase-shifting interferometry are described. Under the latter heading, the methods of zero crossing, phase lock, phase stepping, integrating phase shifting, and sub-Niquist and two-wavelength interferometry are considered.