Experimental study demonstrates dynamic multi-gate logic operations in a silicon nanoelectromechanical resonator up to 85 °C, highlighting potential for heat-resilient mechanical computing.
We report an electro-thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.
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Kazmi et al. (2017) studied this question.
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