Volume extreme ultraviolet nano-holographic imaging with numerical optical sectioning

Three dimensional images were obtained using a single high numerical aperture hologram recorded in a high resolution photoresist with a table top lambda = 46.9 nm laser. Gabor holograms were numerically reconstructed over a range of image planes by sweeping the propagation distance in the numerical reconstruction algorithm, allowing numerical optical sectioning. A robust three dimension image of a test object was obtained with numerical optical sectioning, providing a longitudinal resolution of approximately 2 mum and a lateral resolution of 164 nm.