A 2D Electret-Based Resonant Micro Energy Harvester

This paper reports on the integration of several technologies to realize, to our knowledge, the first two-dimensional (2D) electrostatic resonant micro energy generator. In the generator, ambient vibrations lead to the oscillation of the movable parts of two micromachined and assembled substrates. Charged Cytop-based electret structures patterned on these parts and arranged in a variable capacitor configuration translate the oscillations into a displacement current whose energy is harvested. The device results from (i) the design, fabrication and characterization of low-frequency 2D resonators to extract energy from ambient vibrations, (ii) processing, charging and long-term characterization of Cytop as an electret material and (iii) development of a packaging technology based on adhesive bonding using Cytop as well.