Optimizing ToF-SIMS data analysis with survey-then-target workflow

Key Points

• The aim is to enhance data analysis efficiency in ToF-SIMS for quicker and accurate results.
• Developed a survey-then-target workflow for data analysis.
• Evaluated the workflow's impact on speed and precision of results from ToF-SIMS data.
• Utilized various analytical tools to optimize results.
• The survey-then-target workflow significantly reduced analysis time.
• Improvements in data precision were observed, with a noted increase in accurate results.