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Power dissipation is increasingly important in CPUs ranging from those intended for mobile use, all the way up to high-performance processors for high-end servers. While the bulk of the power dissipated is dynamic switching power, leakage power is also beginning to be a concern. Chipmakers expect that in future chip generations, leakage's proportion of total chip power will increase significantly.
Kaxiras et al. (Mon,) studied this question.