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Chatoyant models free-space opto-electronic components and systems and performs simulations and analyses that allow designers to make informed system level trade-offs. Recently, the use of MEM bulk and surface micro-machining technology has enabled the fabrication of micro-optical-mechanical systems. This paper presents our models for diffractive optics and new analysis techniques which extend Chatoyant to support optical MEMS design. We show these features in the simulation of two optical MEM systems.
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Kurzweg et al. (1999) studied this question.