Maintaining the benefits of CMOS scaling when scaling bogs down

A survey of industry trends from the last two decades of scaling for CMOS logic is examined in an attempt to extrapolate practical directions for CMOS technology as lithography progresses toward the point at which CMOS is limited by the size of the silicon atom itself. Some possible directions for various specialized applications in CMOS logic are explored, and it is further conjectured that double-gate MOSFETs will prove to be the dominant device architecture for this last era of CMOS scaling.