Investigation of the spatial distribution of deformations in quartz piezo elements by x-ray topography

Using X-ray topography on laboratory and synchrotron X-ray sources, the distribution of deformations in the volume of two types of AT-cut quartz resonators of different sizes were obtained. From a comparison of X-ray data and the amplitude-frequency characteristics of the resonators, a correlation between the deformation patterns and the features of oscillatory processes for operating modes and their harmonics, as well as for parasitic modes, was established. A connection between oscillations in parasitic modes, which manifest themselves in the amplitude inhomogeneity, and the topology of the resonators is found. The applied significance of the obtained results for the development and optimization of new designs of piezoelectric elements and the development of their manufacturing technology is noted.