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An advanced slot antenna was developed and the enlargement of surface wave plasma was experimentally investigated using the array configuration of slot antennas for large-area nanocrystalline diamond (NCD) film depositions. An original-geometry slot antenna with an annular shape, designed in this work, permitted broad microwave radiations and vast extent of plasma propagations. Uniform plasmas were produced over a deposition area of 600 × 360 mm2 with densities of ∼1017 m−3 using hydrogen gas by an array configuration of five slot antennas and four rows of the array. A uniform (thickness variation: 10%) and smooth (Ra: 11 nm) NCD film deposition on a 300 × 300 mm2 borosilicate glass plate was achieved using the plasma and a mixed gas of H2/CH4/CO2.
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Kim et al. (2009) studied this question.
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