A high density, carbon nanotube capacitor for decoupling applications

We present a novel application for carbon nanotube devices, implementing a high density 3-D capacitor, which can be useful for decoupling applications to reduce supply voltage variations. The capacitor consists of staggered layers of interleaved carbon nanotubes, alternately connected to anode and cathode contacts. The device can realize a capacitance/area, significantly larger than the ITRS's projected requirements for year 2018. The capacitance per unit area can exceed 1pF/μm2, with a quality factor greater than 100 at 1GHz.