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In this paper, we report on the design, fabrication, and characterization of an in-plane mode-matched tuning-fork gyroscope (M 2 -TFG). The M 2 -TFG uses two high-quality-factor (Q) resonant flexural modes of a single crystalline silicon mi- crostructure to detect angular rate about the normal axis. Operating the device under mode-matched condition, i.e., zero-hertz frequency split between drive and sense modes, enables a Q -factor mechanical amplification in the rate sensitivity and also improves the overall noise floor and bias stability of the device. The M 2 -TFG is fabricated on a silicon-on-insulator substrate using a combination of device and handle-layer silicon etching that precludes the need for any release openings on the proof-mass, thereby maximizing the mass per unit area. Experimental data indicate subdegree-per-hour Brownian noise floor with a measured Allan deviation bias instability of 0.15deg /hr for a 60-mum-thick 1.5 mm X 1.7 mm footprint M 2 -TFG prototype. The gyroscope exhibits an open-loop rate sensitivity of approximately 83 mV/deg/s in vacuum. 2007-0100.
Zaman et al. (Tue,) studied this question.