Formation of Color Centers in Silicon Under Irradiation: Quantum Technologies and Defect Engineering Strategies

Irradiation can impact the properties of semiconductor materials and the function of microelectronic devices. In the present review, we consider how irradiation interacts with semiconductor materials important, primarily silicon (Si), focusing on the defect processes. These, in turn, will have an impact on the physical properties of the material and can impact important properties for devices such as the electrical conductivity and mechanical integrity. We consider the ways that irradiation impacts the operation of microelectronic devices. We thereafter review the defect engineering strategies and other ways to mitigate against the impact of irradiation in devices. Finally, we consider the potentially important role of irradiation defects as qubits in the emerging quantum technologies.