Universal correction procedure for electron-probe microanalysis. II. The absorption correction

For pt.I see ibid., vol.18, p.1233 (1985). A new absorption correction is developed which is shown to work well for quantitative analysis of all systems including light elements. It is based upon representing the X-ray depth distributions as a quadrilateral shape defined by the mean depth of X-ray generation and the position and relative height of the peak in the X-ray depth profile. Equations for describing these parameters in terms of target material, incident electron energy, etc. are derived by reference to tracer and Monte Carlo determinations of X-ray depth distributions.