A simple Monte Carlo method for simulating electron-solid interactions and its application to electron probe microanalysis

A Monte Carlo method based on Curgenven and Duncumb's treatment (1971) is described. It is shown that the predictions of the model agree well with experimental backscattered electron energy distributions and phi ( rho z) curves. The model is used to generate phi ( rho z) curves for a wide range of analytical conditions. Based on these data an examination is carried out of the way in which the mean depth of X-ray production varies with electron accelerating voltage, overvoltage and atomic number of the target. An expression for the mean depth is deduced the form of this expression is compared with that predicted by the Philibert model (1963).