Backscattering of 0middot5-10 keV electrons from solid targets

Measurements have been made of electron backscattering in a range of incident beam energy from 0·5 to 10 keV. The variation of backscattering coefficient η with energy and angle of incidence, and the energy spectrum of backscattered electrons at incidence and take-off angles of 45°, have been measured. Results from carbon, aluminium-silicon, copper and silver were obtained at a pressure of approximately 10−8 Torr to make the effects of contamination under the electron beam negligible.