An analysis of the influence of three substrate shielding methods, unshielded, patterned‐ground shield and floating shield, on a sub‐terahertz (sub‐THz) inductor is presented. In the sub‐THz frequency band, the unshielded inductor showed the best quality‐factor ( Q ‐factor) and self‐resonance frequency (ƒ SR ) since the inserted substrate shield increases the parasitic capacitance. The simulation results using an electromagnetic simulator showed good agreement with the analysis.
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Jeong et al. (2014) studied this question.
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