Humidity sensing properties of spray deposited Fe doped TiO₂ thin film

In the present work, ferrite (Fe) doped TiO 2 thin films with different volume percentage (vol%) were synthesized using a spray pyrolysis technique. The effect of Fe doping on structural properties such as crystallite size, texture coefficient, microstrain, dislocation densities etc. were evaluated from the X ray diffratometry (XRD) data. XRD data revealed a polycrystalline anatase TiO 2 phase for sample synthesized up to 2 vol% and mixed anatase and rutile crystalline phase for sample synthesized at 4 vol% Fe doped TiO 2 . The crystalline size was observed to decrease with increase in Fe dopant vol% and also other structural parameters changes with Fe dopant percentage. In the present work, electrical resistance was observed to decrease with a rise in Fe dopant vol% and temperature of the sample. Thermal properties like temperature coefficient of resistance and activation energy also showed strong correlation with Fe dopant vol%. Humidity sensing properties of the synthesized sample altered with a change in Fe dopant vol%. In the present paper, maximum sensitivity of about 88.7% for the sample synthesized with 2 vol% Fe doped TiO 2 and also the lowest response and recovery time of about 52 and 3 s were reported for the same sample.