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The results of the structural, optical, and electrical characterization of , , and films grown by the successive ionic layer adsorption and reaction process are presented. Polycrystalline cubic and hexagonal films grown on glass and on indium‐tin oxide covered glass have mean crystallite sizes and , and and , respectively, perpendicular and parallel to the film. The pure cubic 3C phase is obtained from up to and the pure hexagonal 2H phase from up to . Texturized heteroepitaxial films of hexagonal have been grown on (111), (001), and (110) Ge, on (111), (001), and (110) and on (111) substrates. Strongly texturized heteroepitaxial films of cubic have been grown on (111) and on (001) . Polycrystalline films consist of densely packed microcrystalline fibrous grains belonging to the transition zone T in Thornton's structural zone model. Polycrystalline films show a strong preferred orientation and have a compact columnar structure belonging to Thornton's zone 2. and films have a refractive index ranging from 2.1 to 2.25 and from 2.15 to 2.35, respectively.
Nicolau et al. (Sat,) studied this question.